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1. (WO2018021514) VALVE AND GAS CONTROL DEVICE

Pub. No.:    WO/2018/021514    International Application No.:    PCT/JP2017/027381
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Sat Jul 29 01:59:59 CEST 2017
IPC: F04B 45/047
B81B 3/00
F16K 31/02
Applicants: MURATA MANUFACTURING CO., LTD.
株式会社村田製作所
Inventors: TANAKA Nobuhira
田中 伸拓
KONDO Daisuke
近藤 大輔
Title: VALVE AND GAS CONTROL DEVICE
Abstract:
This valve is provided with a first plate, a lateral wall plate, a second plate, and a third plate. The first plate has multiple first air holes. The second plate, together with the first plate and the lateral wall plate, constitutes a valve chamber. The second plate is provided with a second main surface that faces a first main surface of the first plate. The second plate has multiple second air holes. The third plate has multiple third air holes. When viewed in a plan view in a direction in which the first plate and the second plate face each other, the multiple third air holes do not overlap any of the multiple second air holes, but overlap the multiple first air holes. Both main surfaces of the third plate face the first main surface and the second main surface, respectively. The third plate is disposed within the valve chamber. When viewed in the plan view in the direction in which the first plate and the second plate face each other, the outer periphery of one of the second air holes and the outer periphery of one the third air holes that is closest to the one of the second air holes have facing edges that fit each other, and the distance between the second air holes and the third air holes at the facing edges is at most 1.2 times as long as the shortest distance between the outer periphery of one of the second air holes and the outer periphery of a corresponding one of the third air holes.