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1. (WO2018021268) INDUSTRIAL ROBOT

Pub. No.:    WO/2018/021268    International Application No.:    PCT/JP2017/026775
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Wed Jul 26 01:59:59 CEST 2017
IPC: B25J 9/06
H01L 21/677
B65G 49/06
Inventors: YAZAWA, Takayuki
矢澤 隆之
TAKASE, Yosuke
高瀬 陽介
An industrial robot 1 that comprises a common arm 8 to which base end sides of two arms 6, 7 are rotatably coupled. Joint parts 16, 17 that couple the arms 6, 7 and the common arm 8 have arranged thereat: rotary shafts that are fixed to the base end sides the arms 6, 7; bearings that rotatably support the rotary shafts; and magnetic fluid seals that are arranged at outer circumferential sides of the rotary shafts. The common arm 8 comprises: a base end part 22 that is coupled to a main body part 9; two tip end parts 23, 24 that hold the bearings and the magnetic fluid seals; and two coupling parts 25, 26 that link the base end part 22 to each of the tip end parts 23, 24. The base end part 22, the tip end parts 23, 24, and the coupling parts 25, 26 are formed as separate bodies. The industrial robot 1 can thereby easily move the common arm 8 into a vacuum chamber and can easily manipulate the common arm 8 inside the vacuum chamber.