Search International and National Patent Collections

1. (WO2018021166) ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VELOCITY SENSOR

Pub. No.:    WO/2018/021166    International Application No.:    PCT/JP2017/026389
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Sat Jul 22 01:59:59 CEST 2017
IPC: G01C 19/5621
H01L 41/047
H01L 41/09
H01L 41/113
Applicants: KYOCERA CORPORATION
京セラ株式会社
Inventors: SOEJIMA, Munetaka
副島 宗高
Title: ANGULAR VELOCITY SENSOR, SENSOR ELEMENT, AND MULTI-AXIS ANGULAR VELOCITY SENSOR
Abstract:
An angular velocity sensor has a piezoelectric body, a drive circuit, and a detection circuit. The piezoelectric body has a frame, a pair of drive arms, and a detection arm. The frame is supported by a pair of supported sections separated from each other in the x axis direction. The pair of drive arms extend, in parallel in the y axis direction, from the frame at positions between the pair of supported sections and mutually separated in the x axis direction. The detection arm extends in the y axis direction from the frame at a position between the pair of drive arms in the x axis direction. The drive circuit applies voltages of mutually inverse phases to the pair of drive arms, such that the pair of drive arms bend towards mutually opposite sides in the x axis direction and vibrate. The detection circuit detects signals generated as a result of bending deformation in the z axis direction of the detection arm.