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|1. (WO2018020863) METHOD FOR FORMING COATING FILM, APPARATUS FOR FORMING COATING FILM AND COMPUTER-READABLE RECORDING MEDIUM|
|Applicants:||TOKYO ELECTRON LIMITED
|Title:||METHOD FOR FORMING COATING FILM, APPARATUS FOR FORMING COATING FILM AND COMPUTER-READABLE RECORDING MEDIUM|
This method for producing a coating film comprises: a first step for heating a body W to be processed, which comprises a substrate W1 and a projected part W2 provided on the surface of the substrate W1; a second step for obtaining a heated liquid by heating a coating liquid; and a third step for spraying the heated liquid in the form of droplets from a nozzle N onto the surface of the body W to be processed, which has been heated in the first step.