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1. (WO2018020863) METHOD FOR FORMING COATING FILM, APPARATUS FOR FORMING COATING FILM AND COMPUTER-READABLE RECORDING MEDIUM

Pub. No.:    WO/2018/020863    International Application No.:    PCT/JP2017/021596
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Tue Jun 13 01:59:59 CEST 2017
IPC: H01L 21/027
B05B 7/04
B05B 7/16
B05D 1/02
B05D 3/02
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
Inventors: OKAMOTO Yoshiki
岡本 芳樹
MIYAMOTO Tetsushi
宮本 哲嗣
OOMURA Kazuhisa
大村 和久
Title: METHOD FOR FORMING COATING FILM, APPARATUS FOR FORMING COATING FILM AND COMPUTER-READABLE RECORDING MEDIUM
Abstract:
This method for producing a coating film comprises: a first step for heating a body W to be processed, which comprises a substrate W1 and a projected part W2 provided on the surface of the substrate W1; a second step for obtaining a heated liquid by heating a coating liquid; and a third step for spraying the heated liquid in the form of droplets from a nozzle N onto the surface of the body W to be processed, which has been heated in the first step.