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1. (WO2018020601) MEASUREMENT JIG FOR FILM THICKNESS METER

Pub. No.:    WO/2018/020601    International Application No.:    PCT/JP2016/072003
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Thu Jul 28 01:59:59 CEST 2016
IPC: G01B 7/06
Applicants: THE CHUGOKU ELECTRIC POWER CO., INC.
中国電力株式会社
Inventors: MAKABE, Katsuhisa
真壁 勝久
Title: MEASUREMENT JIG FOR FILM THICKNESS METER
Abstract:
Provided is a measurement jig 1 that is used in a state of being attached to a probe 52 of a film thickness meter 5 that has a rod-like core 520 and coils 521, 522 wrapped around the core 520 and measures film thickness on the basis of magnetic flux variation when the leading end of the core 520 is made to approach an object to be measured 2. The measurement jig 1 includes a slide member 11 to which the probe 52 is fixed and a guide member 12 that supports the slide member 11 to which the probe 52 is fixed such that the slide member 11 can slide in the axial direction of the core 520. On the side of the core 520 that is made to approach the object to be measured 2, the guide member 12 has a flat surface that is perpendicular to the axis of the core 520. Using a measurement jig 1 comprising the above configuration enhances the work efficiency of film thickness measurement using a film thickness meter 5 and makes it possible to ensure measurement accuracy.