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1. (WO2018020333) SEPARATION METHOD, DISPLAY DEVICE, DISPLAY MODULE, AND ELECTRONIC DEVICE

Pub. No.:    WO/2018/020333    International Application No.:    PCT/IB2017/052918
Publication Date: Fri Feb 02 00:59:59 CET 2018 International Filing Date: Fri May 19 01:59:59 CEST 2017
IPC: H01L 21/02
G02F 1/1368
G09F 9/00
G09F 9/30
H01L 21/336
H01L 27/12
H01L 29/786
H01L 51/50
H05B 33/10
Applicants: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Inventors: OHNO, Masakatsu
KUMAKURA, Kayo
WATANABE, Hiroyuki
YASUMOTO, Seiji
IDOJIRI, Satoru
ADACHI, Hiroki
Title: SEPARATION METHOD, DISPLAY DEVICE, DISPLAY MODULE, AND ELECTRONIC DEVICE
Abstract:
The yield of a separation process is improved. The mass productivity of a display device which is formed through a separation process is improved. A layer is formed over a substrate with use of a material including a resin or a resin precursor. Next, a resin layer is formed by performing heat treatment on the layer. Next, a layer to be separated is formed over the resin layer. Then, the layer to be separated and the substrate are separated from each other. The heat treatment is performed in an atmosphere containing oxygen or while supplying a gas containing oxygen.