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1. (WO2018020296) APPARATUS AND METHOD FOR VACUUM DEPOSITION
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/020296 International Application No.: PCT/IB2016/054477
Publication Date: 01.02.2018 International Filing Date: 27.07.2016
IPC:
C23C 14/24 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22
characterised by the process of coating
24
Vacuum evaporation
Applicants: ARCELORMITTAL[LU/LU]; 24-26, Boulevard d'Avranches L-1160 Luxembourg, LU
Inventors: PACE, Sergio; BE
SILBERBERG, Eric; BE
WILDERS, Dimitri; BE
BONNEMANN, Rémy; BE
GAOUYAT, Lucie; BE
Agent: JOURDIER, Martin; FR
Priority Data:
Title (EN) APPARATUS AND METHOD FOR VACUUM DEPOSITION
(FR) APPAREIL ET PROCÉDÉ DE DÉPÔT PAR ÉVAPORATION SOUS VIDE
Abstract:
(EN) The invention relates to a vacuum deposition facility (1) for continuously depositing, on a running substrate, coatings formed from metal alloys comprising a main element and at least one additional element, the facility comprising a vacuum deposition chamber (2) and a means for running the substrate (S) through the chamber, wherein the facility further comprises: - a vapor jet coater (3), - an evaporation crucible (4) suited to feed the vapor jet coater with a vapor comprising the main element and the at least one additional element, - a recharging furnace (9) suited to feed the evaporation crucible with the main element in molten state and capable of maintaining a constant level of liquid in the evaporation crucible, - a feeding unit (11) suited to be fed with the at least one additional element in solid state and suited to feed the evaporation crucible with the at least one additional element indifferently in molten state, in solid state or partially in solid state. The invention also relates to a process for continuously depositing, on a running substrate, coatings formed from metal alloys comprising a main element and at least one additional element.
(FR) Cette invention concerne une installation de dépôt par évaporation sous vide (1) destinée à déposer en continu, sur un substrat en mouvement, des revêtements faits d'alliages métalliques comprenant un élément principal et au moins un élément supplémentaire, l'installation comprenant une chambre de dépôt par évaporation sous vide (2) et des moyens de déplacement du substrat (S) à travers la chambre, l'installation comprenant en outre : - une coucheuse à jet de vapeur (3), - un creuset d'évaporation (4) approprié pour alimenter la coucheuse à jet de vapeur avec une vapeur comprenant l'élément principal et ledit/lesdits élément(s) supplémentaire(s), - un four de recharge (9) apte à alimenter le creuset d'évaporation avec l'élément principal à l'état fondu et capable de maintenir un niveau constant de liquide dans le creuset d'évaporation, - une unité d'alimentation (11) appropriée pour être alimentée en ledit/lesdits élément(s) supplémentaire(s) à l'état solide et appropriée pour alimenter le creuset d'évaporation avec ledit/lesdits élément(s) supplémentaire(s) indifféremment à l'état fondu, à l'état solide ou à l'état partiellement solide. L'invention concerne en outre un procédé de dépôt continu, sur un substrat en mouvement, de revêtements formés à partir d'alliages métalliques comprenant un élément principal et au moins un élément supplémentaire.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)