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|1. (WO2018019225) DOCKING DEVICE AND METHOD FOR SUBSTRATE|
|Applicants:||SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
|Title:||DOCKING DEVICE AND METHOD FOR SUBSTRATE|
Provided are a docking device and method for a substrate. The docking device for a substrate comprises a rotation mechanism (110) driving a substrate to rotate and at least one substrate suction mechanism (120). The substrate suction mechanism (120) is used to support and fix the substrate. The rotation mechanism (110) drives the substrate suction mechanism (120) to rotate. The docking device for a substrate can preferentially rotate a substrate to a required angular position when the substrate needs to enter a substrate production line apparatus or enter a storage area from a different angular position, thereby realizing rotary docking of the substrate.