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1. (WO2018013003) DIFFRACTION METHOD FOR MEASURING LINEAR SIZE OF OBJECT

Pub. No.:    WO/2018/013003    International Application No.:    PCT/RU2017/000378
Publication Date: Fri Jan 19 00:59:59 CET 2018 International Filing Date: Thu Jun 01 01:59:59 CEST 2017
IPC: G01B 11/02
Applicants: SAINT PETERSBURG NATIONAL RESEARCH UNIVERSITY OF INFORMATION TECHNOLOGIES, MECHANICS AND OPTICS (ITMO UNIVERSITY)
ФЕДЕРАЛЬНОЕ ГОСУДАРСТВЕННОЕ АВТОНОМНОЕ ОБРАЗОВАТЕЛЬНОЕ УЧРЕЖДЕНИЕ ВЫСШЕГО ОБРАЗОВАНИЯ "САНКТ-ПЕТЕРБУРГСКИЙ НАЦИОНАЛЬНЫЙ ИССЛЕДОВАТЕЛЬСКИЙ УНИВЕРСИТЕТ ИНФОРМАЦИОННЫХ ТЕХНОЛОГИЙ, МЕХАНИКИ И ОПТИКИ" (УНИВЕРСИТЕТ ИТМО)
Inventors: FEFILOV, Georgij Dmitrievich
ФЕФИЛОВ, Георгий Дмитриевич
KHRAMOV, Valery Yurevich
ХРАМОВ, Валерий Юрьевич
Title: DIFFRACTION METHOD FOR MEASURING LINEAR SIZE OF OBJECT
Abstract:
The invention relates to monitoring/measurement technology and may be used for measuring the linear (transverse) size of various objects, for instance microwire or fiber, gaps or slits, micro-apertures and round screens having micron-sizes, and also suspensions of microparticles or biological suspensions. The problem which the present invention aims to solve consists in significantly reducing the influence, on the results of measuring the size of an object, of uneven distribution of the amplitude of an irradiating field in the plane of an object to be measured. The problem is solved during a measurement-information extraction stage, by using inflection points in an oscillating signal, which signal is generated when registering a diffraction pattern, the positions of which are robust to a change in the unevenness of distribution of the amplitude of an irradiating field in the plane of an object to be measured.