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1. (WO2018012754) TENSION MASK FRAME ASSEMBLY MANUFACTURING APPARATUS AND METHOD
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/012754 International Application No.: PCT/KR2017/006676
Publication Date: 18.01.2018 International Filing Date: 26.06.2017
IPC:
H01L 51/56 (2006.01) ,H01L 51/00 (2006.01) ,C23C 14/04 (2006.01) ,C23C 14/24 (2006.01)
Applicants: KPS CO., LTD.[KR/KR]; 52, Dongtansandan 10-gil, Dongtan-myeon Hwaseong-si Gyeonggi-do 18487, KR
Inventors: KIM, Jeong Ho; KR
SHIN, Sang Hoon; KR
KIM, Young Soo; KR
Agent: LEE, Hyeong Bok; KR
Priority Data:
10-2016-008840813.07.2016KR
Title (EN) TENSION MASK FRAME ASSEMBLY MANUFACTURING APPARATUS AND METHOD
(FR) APPAREIL ET PROCÉDÉ DE FABRICATION D'UN ENSEMBLE CADRE DE MASQUE DE TENSION
(KO) 텐션마스크 프레임 어셈블리의 제조 장치 및 방법
Abstract: front page image
(EN) Disclosed is a tension mask frame assembly manufacturing apparatus for mounting a tension mask on a rectangular frame having: a pair of support frame parts to which mutually facing edges of a tension mask having a rectangular sheet shape are fixed; and a pair of connection frame parts for mutually connecting both ends of the support frame parts. The manufacturing apparatus comprises: a frame loading unit for loading the tension mask frame assembly; a pressing unit for pressing the support frame parts along the direction of the plate surfaces of support frames between both ends thereof; and a control unit for controlling the pressing unit so as to pre-deform the support frames in correspondence to at least a part of the bending deformation amount of the support frame parts according to the weight of the support frame parts and the tension of the tension mask. Therefore, the tension mask pitch change amount can be reduced according to the weight deformation of the frame in a vertical deposition mask frame assembly.
(FR) L'invention concerne un appareil de fabrication d'un ensemble cadre de masque de tension pour monter un masque de tension sur un cadre rectangulaire présentant : une paire de parties de cadre de support auxquelles sont fixés des bords mutuellement opposés d'un masque de tension présentant une forme de feuille rectangulaire ; et une paire de parties de cadre de liaison pour relier mutuellement les deux extrémités des parties de cadre de support. L'appareil de fabrication comprend : une unité de chargement de cadre pour charger l'ensemble cadre de masque de tension ; une unité de pression pour presser les parties de cadre de support le long de la direction des surfaces de plaque des cadres de support entre leurs deux extrémités ; et une unité de commande pour commander l'unité de pression de façon à pré-déformer les cadres de support en correspondance avec au moins une partie du degré de déformation par courbure des parties de cadre de support en fonction du poids des parties de cadre de support et de la tension du masque de tension. Par conséquent, le degré de changement de pas du masque de tension peut être réduit en fonction de la déformation de poids du cadre dans un ensemble cadre de masque de dépôt vertical.
(KO) 사각 시트형상의 텐션마스크의 상호 대향한 연부가 고정되는 한 쌍의 지지프레임부와 지지프레임부의 양단을 상호 연결하는 한 쌍의 연결프레임부를 갖는 사각틀 형상의 프레임에 텐션마스크를 장착하는 텐션마스크 프레임 어셈블리 제조장치가 개시된다. 제조장치는 텐션마스크 프레임 어셈블리를 로딩하는 프레임로딩부, 지지프레임부를 양단부 사이에서 지지프레임의 판면방향을 따라 가압할 수 있는 가압부, 및 지지프레임부의 자중과 텐션마스크의 장력에 따른 지지프레임부의 굽힘변형량의 적어도 일부에 대응하여 지지프레임을 사전변형하도록 가압부를 제어하는 제어부를 구비한다. 이에 의해, 수직 증착용 마스크프레임 어셈블리에서 프레임의 자중 변형에 따른 텐션 마스크 피치 변화량을 줄일 수 있다.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)