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1. (WO2018012454) SLURRY FOR SUSPENSION PLASMA SPRAYING, METHOD FOR FORMING RARE EARTH ACID FLUORIDE SPRAYED FILM, AND SPRAYING MEMBER

Pub. No.:    WO/2018/012454    International Application No.:    PCT/JP2017/025117
Publication Date: Fri Jan 19 00:59:59 CET 2018 International Filing Date: Tue Jul 11 01:59:59 CEST 2017
IPC: C23C 4/10
C01F 17/00
C23C 4/134
Applicants: SHIN-ETSU CHEMICAL CO., LTD.
信越化学工業株式会社
Inventors: TAKAI Yasushi
高井 康
HAMAYA Noriaki
浜谷 典明
Title: SLURRY FOR SUSPENSION PLASMA SPRAYING, METHOD FOR FORMING RARE EARTH ACID FLUORIDE SPRAYED FILM, AND SPRAYING MEMBER
Abstract:
Provided is a slurry for suspension plasma spraying, which is a spray material used for suspension plasma spraying in an atmosphere including an oxygen-containing gas, contains 5-40 mass% of rare earth fluoride particles having a maximum particle diameter (D100) of 12 μm or less, and contains one or more types of solvent selected from among water and organic solvents. A rare earth acid fluoride-containing sprayed film, in which process shift and particle generation hardly occur, can be stably formed on a base material by carrying out suspension plasma spraying in an atmosphere including an oxygen-containing gas. A spraying member provided with this sprayed film exhibits excellent corrosion resistance to halogen-based gas plasma.