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1. (WO2018012430) THERMAL FLUX SENSOR AND MANUFACTURING METHOD THEREFOR

Pub. No.:    WO/2018/012430    International Application No.:    PCT/JP2017/024985
Publication Date: Fri Jan 19 00:59:59 CET 2018 International Filing Date: Sat Jul 08 01:59:59 CEST 2017
IPC: G01K 17/20
Applicants: DENSO CORPORATION
株式会社デンソー
Inventors: HARADA, Toshikazu
原田 敏一
SAKAIDA, Atusi
坂井田 敦資
TANIGUCHI, Toshihisa
谷口 敏尚
IMURA, Tomohiro
井村 友弘
WATANABE, Hayato
渡邉 隼人
HIRABAYASHI, Masaya
平林 雅也
Title: THERMAL FLUX SENSOR AND MANUFACTURING METHOD THEREFOR
Abstract:
A thermal flux sensor 10 includes a body portion 20 that detects a thermal flux, and fillers 30. The body portion 20 has a first surface 201. The first surface 201 has an uneven shape having a plurality of recessed portions 203 and a plurality of raised portions 204. The plurality of recessed portions 203 are filled with the fillers 30. The surface of the fillers 30 forms a part of an outermost surface 101 of the thermal flux sensor 10. The flatness of the outermost surface 101 of the thermal flux sensor 10 is greater than the flatness of the first surface 201 of the body portion 20.