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1. (WO2018012324) PELLICLE FRAME AND PELLICLE
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Pub. No.: WO/2018/012324 International Application No.: PCT/JP2017/024177
Publication Date: 18.01.2018 International Filing Date: 30.06.2017
IPC:
G03F 1/64 (2012.01) ,C22C 21/00 (2006.01) ,C22F 1/04 (2006.01) ,C25D 11/04 (2006.01) ,C25D 11/06 (2006.01) ,C25D 11/22 (2006.01) ,C22F 1/00 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
1
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
62
Pellicles or pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
64
characterised by the frames, e.g. structure or material thereof
C CHEMISTRY; METALLURGY
22
METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
C
ALLOYS
21
Alloys based on aluminium
C CHEMISTRY; METALLURGY
22
METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
F
CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS OR NON-FERROUS ALLOYS
1
Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
04
of aluminium or alloys based thereon
C CHEMISTRY; METALLURGY
25
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
D
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; JOINING WORKPIECES BY ELECTROLYSIS; APPARATUS THEREFOR
11
Electrolytic coating by surface reaction, i.e. forming conversion layers
02
Anodisation
04
of aluminium or alloys based thereon
C CHEMISTRY; METALLURGY
25
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
D
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; JOINING WORKPIECES BY ELECTROLYSIS; APPARATUS THEREFOR
11
Electrolytic coating by surface reaction, i.e. forming conversion layers
02
Anodisation
04
of aluminium or alloys based thereon
06
characterised by the electrolytes used
C CHEMISTRY; METALLURGY
25
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
D
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; JOINING WORKPIECES BY ELECTROLYSIS; APPARATUS THEREFOR
11
Electrolytic coating by surface reaction, i.e. forming conversion layers
02
Anodisation
04
of aluminium or alloys based thereon
18
After-treatment, e.g. pore-sealing
20
Electrolytic after-treatment
22
for colouring layers
C CHEMISTRY; METALLURGY
22
METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
F
CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS OR NON-FERROUS ALLOYS
1
Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
Applicants:
日本軽金属株式会社 NIPPON LIGHT METAL COMPANY, LTD. [JP/JP]; 東京都品川区東品川2丁目2番20号 2-20, Higashi-shinagawa 2-chome, Shinagawa-ku, Tokyo 1408628, JP
Inventors:
田口 喜弘 TAGUCHI Yoshihiro; JP
山口 隆幸 YAMAGUCHI Takayuki; JP
兪 俊 YU Jun; JP
石渡 保生 ISHIWATA Yasuo; JP
Agent:
仲 晃一 NAKA, Koichi; JP
森貞 好昭 MORISADA Yoshiaki; JP
田中 勲 TANAKA Isao; JP
Priority Data:
2016-13752312.07.2016JP
Title (EN) PELLICLE FRAME AND PELLICLE
(FR) CADRE DE PELLICULE ET PELLICULE
(JA) ペリクル枠及びペリクル
Abstract:
(EN) A pellicle frame (2) which can effectively suppress deformation of an exposure master plate (8) caused by adhesion of the pellicle (1), and which does not have a complex shape, and a pellicle which uses said pellicle frame are provided. This pellicle frame is provided with an anodic oxidation coating on the surface of an aluminum alloy frame, and is characterized in that the aluminum alloy frame contains Ca: 5.0-10.0 wt% with the remainder aluminum and unavoidable impurities, the area (volume) ratio of the Al4Ca phase, which is a dispersed phase, is greater than or equal to 25%, the crystal structure of part of the Al4Ca phase is formed from an aluminum alloy which is monoclinic, and the anodic oxidation coating has Al4Ca particles.
(FR) La présente invention porte sur un cadre de pellicule (2) qui peut empêcher de manière efficace la déformation d'une plaque maîtresse d'exposition (8) provoquée par l'adhérence de la pellicule (1), et qui ne présente pas une forme complexe, ainsi que sur une pellicule qui utilise ledit cadre de pellicule. Ce cadre de pellicule est pourvu d'un revêtement d'oxydation anodique sur la surface d'un cadre en alliage d'aluminium, et est caractérisé en ce que le cadre en alliage d'aluminium contient du calcium (Ca) en une quantité comprise entre 5,0 et 10,0 % en poids, le reste étant de l'aluminium et des impuretés inévitables, le rapport surfacique (volumique) de la phase Al4Ca, qui est une phase dispersée, est supérieur ou égal à 25 %, la structure cristalline d'une partie de la phase Al4Ca est composée d'un alliage d'aluminium qui est monoclinique, et le revêtement d'oxydation anodique comporte des particules d'Al4Ca.
(JA) ペリクル(1)の貼り付けによる露光原版(8)の変形を効果的に抑制可能なペリクル枠(2)であって、複雑形状を有さないペリクル枠及び当該ペリクル枠を用いたペリクルを提供する。 アルミニウム合金製フレーム枠の表面に陽極酸化皮膜を備えたペリクル枠であって、当該アルミニウム合金製フレーム枠は、Ca:5.0~10.0wt%、残部がアルミニウムと不可避的不純物を有し、分散相であるAlCa相の面積(体積)率が25%以上であり、AlCa相の一部の結晶構造が単斜晶であるアルミニウム合金からなり、陽極酸化皮膜がAlCa粒子を有すること、を特徴とするペリクル枠。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)