Search International and National Patent Collections

1. (WO2018011953) OPTICAL ELEMENT ANGLE ADJUSTMENT DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

Pub. No.:    WO/2018/011953    International Application No.:    PCT/JP2016/070884
Publication Date: Fri Jan 19 00:59:59 CET 2018 International Filing Date: Fri Jul 15 01:59:59 CEST 2016
IPC: G02B 7/00
G02B 7/198
G03F 7/20
H05G 2/00
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: NAGAHAMA, Kenshiro
長濱 憲志郎
WATANABE, Yukio
渡辺 幸雄
Title: OPTICAL ELEMENT ANGLE ADJUSTMENT DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Abstract:
This optical element angle adjustment device is provided with: a first hinge, i.e., an elastic hinge that connects a first plate and a second plate to each other; an optical element holding section attached to the first plate and/or the second plate; and a first adjustment screw for adjusting the tilt angle of the first plate and/or the second plate by applying a force in the direction in which the first hinge is closed. A first pressing member, which is slidably in contact with the first plate and/or the second plate, is provided at a first adjustment screw end portion in the axis direction of the first adjustment screw. A first pressing member-side contact section and/or a first hinge-side contact section, with which the first pressing member is in contact, is formed as a curved surface section having a curved surface shape.