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1. (WO2018010439) INDIUM TIN OXIDE FILM, METHOD FOR PREPARING SAME, ARRAY SUBSTRATE COMPRISING SAME, AND DISPLAY DEVICE

Pub. No.:    WO/2018/010439    International Application No.:    PCT/CN2017/074765
Publication Date: Fri Jan 19 00:59:59 CET 2018 International Filing Date: Sat Feb 25 00:59:59 CET 2017
IPC: C23C 14/28
C23C 14/35
C23C 14/08
H01L 27/12
H01L 21/77
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
HEFEI BOE DISPLAY LIGHTING CO., LTD.
合肥京东方显示光源有限公司
Inventors: ZHANG, Qiping
张启平
SUN, Wenbo
孙文波
QIAN, Yejia
钱叶甲
Title: INDIUM TIN OXIDE FILM, METHOD FOR PREPARING SAME, ARRAY SUBSTRATE COMPRISING SAME, AND DISPLAY DEVICE
Abstract:
An indium tin oxide film (7), a method for preparing same, an array substrate comprising the indium tin oxide film (7), and a display device comprising the array substrate. The method for preparing the indium tin oxide film (7) comprises: providing discrete indium oxide target (5), tin target (6) and matrix (4) in a deposition chamber; generating oxygen particles and indium particles (51) from the target surface of the indium oxide target (5), and generating tin particles (61) from the target surface of the tin target (6); and depositing the oxygen particles, the indium particles, and the tin particles (61) on the surface of the matrix to form the indium tin oxide film (7).