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1. (WO2018009937) IMAGING APPARATUS AND METHODS
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2018/009937 International Application No.: PCT/US2017/041390
Publication Date: 11.01.2018 International Filing Date: 10.07.2017
IPC:
H01J 37/20 (2006.01) ,G01N 21/00 (2006.01) ,G01N 21/01 (2006.01) ,G01N 21/17 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
20
Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
01
Arrangements or apparatus for facilitating the optical investigation
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
Applicants:
SOUTHERN RESEARCH INSTITUTE [US/US]; 2000 9th Avenue South Birmingham, AL 35205, US
Inventors:
RALPH, William Carter; US
CONNOLLY, Kevin; US
Agent:
FINNAN, Patrick; US
EDELL, Ira, C.; US
CROSLAND, David, W.; US
ALDAG, Andrew, J.; US
EDELL SHAPIRO & FINNAN, LLC; 9801 Washingtonian Blvd., Suite 750 Gaithersburg, MD 20878, US
Priority Data:
15/205,54708.07.2016US
Title (EN) IMAGING APPARATUS AND METHODS
(FR) APPAREIL ET PROCÉDÉS D'IMAGERIE
Abstract:
(EN) An apparatus for imaging a feature within a specimen is provided. According to one implementation the apparatus includes a substrate that is configured to support a specimen on an upper surface of the substrate so that the specimen resides over a hole that extends through the substrate. A heater is located vertically above the upper surface of the substrate. The heater is configured to heat the specimen when the specimen is supported on the substrate. An imaging device is located vertically below the lower surface of the substrate. The imaging device has an unobstructed line of sight to and through the hole in the substrate. The lower surface of the substrate is supported on a heat insulating platform in a manner that permits air to flow between the heat insulating platform and the lower surface of the substrate.
(FR) La présente invention concerne un appareil d'imagerie d'une caractéristique. Selon un mode de réalisation, l'appareil comprend un substrat configuré pour soutenir un spécimen sur une surface supérieure du substrat de telle sorte que l'échantillon se trouve sur un trou qui s'étend à travers le substrat. Un dispositif de chauffage est situé verticalement au-dessus de la surface supérieure du substrat. Le dispositif de chauffage est conçu pour chauffer l'échantillon lorsque ce dernier est soutenu sur le substrat. Un dispositif d'imagerie est situé verticalement au-dessous de la surface inférieure du substrat. Le dispositif d'imagerie présente une ligne de visée non obstruée vers et à travers le trou dans le substrat. La surface inférieure du substrat est soutenue sur une plate-forme d'isolation thermique d'une manière permettant à l'air de s'écouler entre la plate-forme d'isolation thermique et la surface inférieure du substrat.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)
Also published as:
EP3482411