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1. (WO2018008851) THICKNESS MEASURING APPARATUS
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Pub. No.: WO/2018/008851 International Application No.: PCT/KR2017/005663
Publication Date: 11.01.2018 International Filing Date: 31.05.2017
IPC:
G01B 11/06 (2006.01) ,G01B 9/02 (2006.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
02
for measuring length, width, or thickness
06
for measuring thickness
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
9
Instruments as specified in the subgroups and characterised by the use of optical measuring means
02
Interferometers
Applicants:
엘지전자 주식회사 LG ELECTRONICS INC. [KR/KR]; 서울시 영등포구 여의대로 128 128 Yeoui-daero Yeongdeungpo-gu Seoul 07336, KR
Inventors:
배진형 BAE, Jinhyeong; KR
Agent:
김기문 KIM, Ki Moon; KR
Priority Data:
62/358,05303.07.2016US
Title (EN) THICKNESS MEASURING APPARATUS
(FR) APPAREIL DE MESURE D’ÉPAISSEUR
(KO) 두께 측정 장치
Abstract:
(EN) A thickness measuring apparatus according to an embodiment of the present invention may comprise: a light emission unit for irradiating light to an object; a lens unit for collecting light generated in the light emission unit; a lattice pattern generation unit through which light collected through the lens unit passes; a light reception unit for receiving light reflected from multiple interlayer boundaries of the object; and a calculation unit for obtaining a thickness of at least one of multiple layers of the object on the basis of a difference in height between lattice patterns which are formed on a surface of the object by the lattice pattern generation unit.
(FR) La présente invention concerne un appareil de mesure d’épaisseur pouvant comprendre : une unité d’émission de lumière destinée à irradier de la lumière au niveau d’un objet ; une unité lentille destinée à recueillir la lumière produite dans l’unité d’émission de lumière ; une unité de production de motifs en réseau à travers laquelle la lumière recueillie à travers l’unité lentille passe ; une unité de réception de lumière destinée à recevoir la lumière reflétée des multiples limites intercouches de l’objet ; et une unité de calcul destinée à obtenir une épaisseur d’au moins l’une des multiple couches de l’objet sur la base d’une différence de hauteur entre les motifs du réseau qui sont formés sur une surface de l’objet par l’unité de production de motifs en réseau.
(KO) 본 발명의 실시 예에 따른 두께 측정 장치는 대상체에 광을 조사하는 발광부, 상기 발광부에서 발생하는 빛이 모이는 렌즈부, 상기 렌즈부를 통해 모인 빛이 통과하는 격자 무늬 발생부, 상기 대상체의 복수의 층간 경계로부터 반사되는 광을 수신하는 수광부 및 상기 격자 무늬 발생부에 따라 상기 대상체의 표면에 형성되는 격자 무늬의 높이 차에 기초하여 상기 대상체의 복수의 층 중 적어도 하나의 두께를 획득하는 연산부를 포함할 수 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)