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|1. (WO2018008440) HEAT FLUX SENSOR MODULE AND MANUFACTURING METHOD THEREFOR|
|Title:||HEAT FLUX SENSOR MODULE AND MANUFACTURING METHOD THEREFOR|
A heat flux sensor module 2 is provided with: a first film 20 having a surface 21; multiple sensor chips 10 which are disposed on the surface 21 so as to be spaced from one another and which each detect heat flux; a second film 30 stacked on the surface 21 side of the first film 20 such that the multiple sensor chips 10 are sandwiched between the first film 20 and the second film 30; and heat conduction members 40 which are disposed between the adjacent sensor chips 10 and each of which has heat conductivity higher than that of air. The heat conduction members 40 are in contact with both the first film 20 and the second film 30.