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1. (WO2018008365) LIGHT WASHING TREATMENT DEVICE

Pub. No.:    WO/2018/008365    International Application No.:    PCT/JP2017/022318
Publication Date: Fri Jan 12 00:59:59 CET 2018 International Filing Date: Sat Jun 17 01:59:59 CEST 2017
IPC: B29C 33/72
B08B 7/00
B29C 59/02
H01L 21/027
Applicants: USHIO DENKI KABUSHIKI KAISHA
ウシオ電機株式会社
Inventors: YOSHIHARA, Keita
吉原 啓太
HIROSE, Kenichi
廣瀬 賢一
Title: LIGHT WASHING TREATMENT DEVICE
Abstract:
The purpose of the present invention is to provide a light washing treatment device capable of performing washing treatment on a surface of a template made of quartz glass in a short period of time. A light washing treatment device according to the present invention is a light washing treatment device that performs washing treatment on a surface of a template made of quartz glass used in nanoimprint with ultraviolet rays, the light washing treatment device being characterized by comprising: a treatment chamber forming material that forms a treatment chamber in which the template to be treated is arranged and to which treatment gas is supplied; a housing provided facing the template arranged in the treatment chamber with a gap formed therebetween and having a window member allowing the ultraviolet rays to pass therethrough; a ultraviolet-ray light source arranged in the housing and irradiating the template with the ultraviolet rays via the window member; and a heating means for heating the template.