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1. (WO2018008198) RESONATOR AND RESONANCE DEVICE
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2018/008198 International Application No.: PCT/JP2017/011184
Publication Date: 11.01.2018 International Filing Date: 21.03.2017
IPC:
H03H 9/10 (2006.01) ,B81B 3/00 (2006.01) ,H01L 41/113 (2006.01) ,H03H 9/24 (2006.01)
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
02
Details
05
Holders; Supports
10
Mounting in enclosures
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
08
Piezo-electric or electrostrictive elements
113
with mechanical input and electrical output
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
24
Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive
Applicants:
株式会社村田製作所 MURATA MANUFACTURING CO., LTD. [JP/JP]; 京都府長岡京市東神足1丁目10番1号 10-1, Higashikotari 1-chome, Nagaokakyo-shi, Kyoto 6178555, JP
Inventors:
後藤 雄一 GOTO, Yuichi; JP
Agent:
稲葉 良幸 INABA, Yoshiyuki; JP
大貫 敏史 ONUKI, Toshifumi; JP
Priority Data:
2016-13353705.07.2016JP
Title (EN) RESONATOR AND RESONANCE DEVICE
(FR) RÉSONATEUR ET DISPOSITIF DE RÉSONANCE
(JA) 共振子及び共振装置
Abstract:
(EN) In order to avoid the resonance frequency from being affected by the charge on an insulator layer on a holding unit, this resonator is provided with: a vibration unit which has a piezoelectric film and a lower electrode and upper electrode provided oppositely of each other with the piezoelectric film interposed therebetween and which vibrates at a prescribed vibration mode; a holding unit which is provided at least around the maximum-displacement region, where displacement of vibration in the vibration unit is maximal, and which has an insulation film; a holding arm which connects the vibration unit and the holding unit; and a conducting section which is formed in contact with the insulation film of the holding unit in at least the region of the holding unit opposite of the maximum displacement region of the vibration unit, wherein the conducting unit is either electrically connected to the lower or the upper electrode, or is grounded.
(FR) Afin d'éviter que la fréquence de résonance ne soit affectée par la charge sur une couche isolante sur une unité de maintien, ce résonateur comprend : une unité de vibration qui a un film piézoélectrique et une électrode inférieure ainsi qu'une électrode supérieure disposées en regard l'une de l'autre, le film piézoélectrique étant intercalé entre elles, et qui vibre selon un mode de vibration prescrit ; une unité de maintien qui est disposée au moins autour de la région de déplacement maximal, où le déplacement de la vibration dans l'unité de vibration est maximal, et qui comporte un film isolant ; un bras de maintien qui relie l'unité de vibration et l'unité de maintien ; et une section conductrice qui est formée en contact avec le film isolant de l'unité de maintien au moins dans la région de l'unité de maintien opposée à la région de déplacement maximal de l'unité de vibration, l'unité conductrice étant soit électriquement connectée à l'électrode inférieure ou supérieure, soit mise à la terre.
(JA) 保持部上の絶縁体層に帯電した電荷が共振周波数に与える影響を抑制する。 圧電膜と、当該圧電膜を間に挟んで対向するように設けられた下部電極及び上部電極とを有し、所定の振動モードで振動する振動部と、振動部における振動の変位が最大となる変位最大領域の周囲に少なくとも設けられ、絶縁膜を有する保持部と、振動部と保持部とを接続する保持腕と、保持部における少なくとも振動部の変位最大領域に対向する領域において、保持部の絶縁膜に接して形成された導電部と、を備え、導電部は、下部電極又は前記上部電極と電気的に接続されるか、又は、接地される。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)