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1. (WO2018007126) METHOD AND APPARATUS FOR CALCULATING ELECTROMAGNETIC SCATTERING PROPERTIES OF FINITE PERIODIC STRUCTURES

Pub. No.:    WO/2018/007126    International Application No.:    PCT/EP2017/064754
Publication Date: Fri Jan 12 00:59:59 CET 2018 International Filing Date: Sat Jun 17 01:59:59 CEST 2017
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: SETIJA, Irwan, Dani
VAN DEN BERG, Petrus, Maria
Title: METHOD AND APPARATUS FOR CALCULATING ELECTROMAGNETIC SCATTERING PROPERTIES OF FINITE PERIODIC STRUCTURES
Abstract:
A method of determining electromagnetic scattering properties of a finite periodic structure has the steps: 1002: Calculating a single-cell contrast current density, within a unit-cell supporting domain of a single one of a finite collection of unit cells. 1004: Calculating a scattered electric field outside the finite collection of unit cells, by integrating, over the single unit cell's supporting domain, a Green's function with the determined single-cell contrast current density. 1006: The Green's function is obtained for observation points outside the finite collection of unit cells by summation across the finite collection of unit cells. The Green's function integrated with the determined single- cell contrast current density is obtained for observation points above the supporting domain with respect to a substrate underlying the finite periodic structure. 1008: Determining an electromagnetic scattering property, for example a diffraction pattern, of the finite periodic structure using the calculated scattered electric field.