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1. (WO2018007108) ILLUMINATION SOURCE FOR AN INSPECTION APPARATUS, INSPECTION APPARATUS AND INSPECTION METHOD

Pub. No.:    WO/2018/007108    International Application No.:    PCT/EP2017/064362
Publication Date: Fri Jan 12 00:59:59 CET 2018 International Filing Date: Wed Jun 14 01:59:59 CEST 2017
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: TINNEMANS, Patricius, Aloysius Jacobus
LIN, Nan
ROOBOL, Sander, Bas
MATHIJSSEN, Simon, Gijsbert, Josephus
Title: ILLUMINATION SOURCE FOR AN INSPECTION APPARATUS, INSPECTION APPARATUS AND INSPECTION METHOD
Abstract:
Disclosed is an illumination source for generating measurement radiation for an inspection apparatus. The source generates at least first measurement radiation and second measurement radiation such that the first measurement radiation and the second measurement radiation interfere to form combined measurement radiation modulated with a beat component. The illumination source may be a HHG source. Also disclosed is an inspection apparatus comprising such a source and an associated inspection method.