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1. (WO2018005404) METHOD AND SYSTEM FOR MEASURING GEOMETRIC PARAMETERS OF THROUGH HOLES

Pub. No.:    WO/2018/005404    International Application No.:    PCT/US2017/039360
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Wed Jun 28 01:59:59 CEST 2017
IPC: G01B 11/12
Applicants: CORNING INCORPORATED
Inventors: GOERS, Uta-Barbara
SHARPS, Robert Wendell
Title: METHOD AND SYSTEM FOR MEASURING GEOMETRIC PARAMETERS OF THROUGH HOLES
Abstract:
A method of measuring geometric parameters of through holes in a thin substrate incudes acquiring images of select sub-volumes of the substrate using an optical system having a field of depth greater than a thickness of the substrate. The acquired images are processed to determine the desired geometric parameters.