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1. (WO2018005047) METHODS AND SYSTEMS PROVIDING MISALIGNMENT CORRECTION IN ROBOTS

Pub. No.:    WO/2018/005047    International Application No.:    PCT/US2017/036904
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Sat Jun 10 01:59:59 CEST 2017
IPC: B25J 9/10
B25J 9/04
B25J 11/00
B25J 17/02
B25J 18/04
Applicants: APPLIED MATERIALS, INC
Inventors: FREEMAN, Gregory J.
FREEMAN, Marvin L.
CRANMER, Adam
Title: METHODS AND SYSTEMS PROVIDING MISALIGNMENT CORRECTION IN ROBOTS
Abstract:
Methods of correcting positional misalignment of blades in robots, such as dual-bladed robots, are described. The methods include, in one or more embodiments, a robot including moveable arms and an end effector attached to one of the moveable arms, a flag disposed on one of the moveable arms or the end effector, a chamber adapted to be serviced by the end effector, a beam sensor positioned at a distance from the chamber, and correcting misalignment of the end effector wherein the misalignment occurs between an initial linear center-finding location and the estimated center of the chamber. Systems of such electronic device calibration are also disclosed. Numerous other aspects are provided.