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1. (WO2018004869) SWITCHED CLOSED LOOP READ-OUT METHODS AND SYSTEMS FOR RESONANT SENSING PLATFORMS

Pub. No.:    WO/2018/004869    International Application No.:    PCT/US2017/033385
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Fri May 19 01:59:59 CEST 2017
IPC: G01R 33/00
Applicants: INTEL CORPORATION
Inventors: DOGIAMIS, Georgios C.
OSTER, Sasha N.
EID, Feras
YOUNG, Ian A.
Title: SWITCHED CLOSED LOOP READ-OUT METHODS AND SYSTEMS FOR RESONANT SENSING PLATFORMS
Abstract:
Embodiments of the invention include a resonant sensing system comprising driving circuitry to generate a drive signal during excitation time periods, a first switch coupled to the driving circuitry, and a sensing device coupled to the driving circuitry via the first switch during the excitation time periods. The sensing device includes beams to receive the drive signal during a first excitation time period that causes the beams to mechanically oscillate and generate a first induced electromotive force (emf) in response to the drive signal. The first switch decouples the sensing device and the driving circuitry during measurement time periods for measurement of the induced emf.