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1. (WO2018004550) SELF-GENERATED BARRIERS WITH TEMPLATED METAL FOR EFFICIENT ELECTRIC CONDUCTION

Pub. No.:    WO/2018/004550    International Application No.:    PCT/US2016/039903
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Wed Jun 29 01:59:59 CEST 2016
IPC: H01L 21/28
H01L 21/285
Applicants: INTEL CORPORATION
Inventors: MANIPATRUNI, Sasikanth
CHAWLA, Jasmeet S.
WIEGAND, Christopher J.
SINGH, Kanwal Jit
TORRES, Jessica M.
NIKONOV, Dmitri E.
YOUNG, Ian A.
Title: SELF-GENERATED BARRIERS WITH TEMPLATED METAL FOR EFFICIENT ELECTRIC CONDUCTION
Abstract:
An apparatus is provided which comprises: a metal region having an ordered crystalline structure; and a barrier layer adjacent to the metal region, the barrier layer comprising Zinc. An apparatus is provided which comprises: a metal region having an ordered crystalline structure, the metal region having traces of zinc; a crystallinity templating layer adjacent to the metal region; and a barrier layer adjacent to the crystallinity templating layer, the barrier layer comprising zinc. An integrated circuit (IC) die is provided which comprises: a barrier layer comprising zinc; and an interconnect formed within the barrier layer, the interconnect comprising a crystalline metal.