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1. (WO2018004088) VACUUM DEGREE MEASUREMENT SENSOR USING GRAPHENE NANORIBBON
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Pub. No.: WO/2018/004088 International Application No.: PCT/KR2016/014801
Publication Date: 04.01.2018 International Filing Date: 16.12.2016
IPC:
G01L 21/12 (2006.01) ,B82Y 15/00 (2011.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
21
Vacuum gauges
10
by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
12
measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
15
Nano-technology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Applicants: SILLA UNIVERSITY[KR/KR]; (Silla University, Gwaebeop-dong) 140, Baegyang-daero 700beon-gil, Sasang-gu, Busan 46958, KR
Inventors: AHN, Sung-Il; KR
JO, Hwang-Duck; KR
NO, Tae-Hwa; KR
KIM, Dong-Kyu; KR
LEE, Chang-Hee; KR
SON, Jae-Hong; KR
Agent: LEE, Han-Ook; KR
Priority Data:
10-2016-008009327.06.2016KR
Title (EN) VACUUM DEGREE MEASUREMENT SENSOR USING GRAPHENE NANORIBBON
(FR) CAPTEUR DE MESURE DE DEGRÉ DE VIDE UTILISANT UN NANORUBAN DE GRAPHÈNE
(KO) 그래핀 나노리본을 이용한 진공도 측정 센서
Abstract:
(EN) The present invention relates to a vacuum degree measurement sensor using a graphene nanoribbon, which comprises a thin graphene nanoribbon film configured by at least two graphene nanoribbon layers and senses the degree of a vacuum by using a resistance value of each of the graphene nanoribbon layers. A vacuum degree measurement sensor using a graphene nanoribbon according to the present invention uses a graphene nanoribbon and thus has a short cross-sectional distance and a resistance value that significantly changes according to a curved state thereof. Therefore, the vacuum degree measurement sensor has increased sensitivity and allows gas molecules trapped between graphene layers to be diffused in a short distance, so that the sensor can have an increased response speed according to the degree of a vacuum.
(FR) La présente invention concerne un capteur de mesure de degré de vide utilisant un nanoruban de graphène, qui comprend un film mince de nanorubans de graphène consistant en au moins deux couches de nanoruban de graphène et qui détecte le degré de vide en utilisant une valeur de résistance de chacune des couches de nanoruban de graphène. Un capteur de mesure de degré de vide utilisant un nanoruban de graphène selon la présente invention utilise un nanoruban de graphène et présente par conséquent une faible distance de section transversale et une valeur de résistance qui change de manière significative en fonction de l'état de sa courbure. Par conséquent, le capteur de mesure de degré de vide a une sensibilité accrue et permet aux molécules de gaz piégées entre les couches de graphène d'être diffusées sur une courte distance, ce qui permet au capteur d'avoir une vitesse de réponse plus élevée en fonction du degré de vide.
(KO) 본 발명은 그래핀 나노리본을 이용한 진공도 측정 센서로서, 2층 이상의 그래핀 나노리본 층으로 이루어진 그래핀 나노리본 박막을 포함하여, 상기 그래핀 나노리본 층의 저항값으로 진공도를 감지하는 그래핀 나노리본을 이용한 진공도 측정 센서에 관한 것이다. 본 발명에 따른 그래핀 나노리본을 이용한 진공도 측정 센서는 그래핀 나노리본을 사용하여 단면 거리가 짧아 굴곡 상태에 따라 저항값 변화가 매우 커, 센서의 민감도가 증가하는 동시에 그래핀 층간에 갇혀있는 가스 분자의 확산이 짧은 거리에서 일어나 진공도에 따른 응답속도를 높일 수 있는 장점이 있다.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Korean (KO)
Filing Language: Korean (KO)