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1. (WO2018003426) COATING TREATMENT DEVICE, COATING TREATMENT METHOD AND COMPUTER STORAGE MEDIUM

Pub. No.:    WO/2018/003426    International Application No.:    PCT/JP2017/020963
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Wed Jun 07 01:59:59 CEST 2017
IPC: G02B 5/30
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
Inventors: IKEDA, Fumihiko
池田 文彦
Title: COATING TREATMENT DEVICE, COATING TREATMENT METHOD AND COMPUTER STORAGE MEDIUM
Abstract:
This coating treatment device, for coating a substrate with a coating solution that contains an optical material, is provided with a holding unit which holds the substrate, an application nozzle which discharges a coating solution onto the substrate held by the holding unit, and a movement mechanism which moves the holding unit and the application nozzle relative to each other in orthogonal directions, wherein the coating solution can be coated onto the substrate efficiently and suitably at any angle.