Search International and National Patent Collections

1. (WO2018003269) SUBSTRATE INSPECTION DEVICE

Pub. No.:    WO/2018/003269    International Application No.:    PCT/JP2017/016645
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Fri Apr 21 01:59:59 CEST 2017
IPC: H01L 21/66
G01R 31/28
G06F 11/22
G06F 9/44
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
Inventors: SUGIYAMA, Katsuaki
杉山 克昌
MITSUI, Atsuo
三井 淳夫
KOSUGA, Yutaka
小菅 豊
NARIKAWA, Kenichi
成川 健一
MORITA, Shingo
森田 慎吾
Title: SUBSTRATE INSPECTION DEVICE
Abstract:
Provided is a substrate inspection device capable of preventing inconveniencing a user in relation to the development of a test program. A prober 10 that executes a wafer-level system-level test comprises a development environment 34 for a test program, the development environment including: a user interface unit 27 for a user to edit the test program; and a test program engine 28 that compiles, executes, and debugs the test program.