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1. (WO2018002565) MEMS DEVICES AND PROCESSES
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2018/002565    International Application No.:    PCT/GB2016/051973
Publication Date: 04.01.2018 International Filing Date: 30.06.2016
IPC:
H04R 19/00 (2006.01), H04R 19/04 (2006.01), B81B 3/00 (2006.01), H04R 7/04 (2006.01), H04R 7/18 (2006.01)
Applicants: CIRRUS LOGIC INTERNATIONAL SEMICONDUCTOR LTD [GB/GB]; 7B Nightingale Way Quartermile Edinburgh EH3 9EG (GB)
Inventors: CARGILL, Scott Lyall; (GB).
JENKINS, Colin Robert; (GB).
BOYD, Euan James; (GB)
Agent: REES, Simon John Lewis; (GB)
Priority Data:
Title (EN) MEMS DEVICES AND PROCESSES
(FR) DISPOSITIFS MEMS ET PROCESSUS ASSOCIÉS
Abstract: front page image
(EN)A MEMS transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane. A peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity. The peripheral edge of the cavity may further define at least one perimeter region that is concave with reference to the center of the cavity.
(FR)Une structure de transducteur MEMS comprend un substrat comportant une cavité. Une couche de membrane est supportée par rapport au substrat pour former une membrane souple. Un bord périphérique de la cavité définit au moins une région périmétrique qui est convexe par rapport au centre de la cavité. Le bord périphérique de la cavité peut aussi définir au moins une région périmétrique qui est concave par rapport au centre de la cavité.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)