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1. (WO2018001972) ADAPTIVE FILTER FOR IN-LINE CORRECTION
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Pub. No.: WO/2018/001972 International Application No.: PCT/EP2017/065729
Publication Date: 04.01.2018 International Filing Date: 26.06.2017
IPC:
G03F 7/20 (2006.01) ,G03F 9/00 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
9
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Applicants: ASML HOLDING N.V.[NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors: CATEY, Eric, Brian; US
AARTS, Igor, Matheus, Petronella; US
AUGELLI, Robert, Anthony; US
MALYK, Sergey; US
Agent: SLENDERS, Peter; NL
Priority Data:
62/356,95930.06.2016US
62/522,50220.06.2017US
Title (EN) ADAPTIVE FILTER FOR IN-LINE CORRECTION
(FR) FILTRE ADAPTATIF POUR CORRECTION EN LIGNE
Abstract:
(EN) A method of applying a measurement correction includes calculating a first correction value based on a first coefficient and the measurement; calculating a second correction value based on a second coefficient, greater than the first coefficient, and the measurement; and calculating a third correction value based on a third coefficient, greater than the second coefficient, and the measurement. The method also includes applying the third correction value to the measurement if a difference between the first correction value and the third correction value is above a first threshold value; applying the second correction value to the measurement if a difference between the first correction value and the second correction value is above a second threshold value; and applying the first correction value to the measurement if the difference between the first correction value and the second correction value is below or equal to the second threshold value.
(FR) L'invention concerne un procédé d'application d'une correction de mesure qui consiste à calculer une première valeur de correction sur la base d'un premier coefficient et de la mesure ; calculer une deuxième valeur de correction sur la base d'un deuxième coefficient, supérieur au premier coefficient, et de la mesure ; et calculer une troisième valeur de correction sur la base d'un troisième coefficient, supérieur au deuxième coefficient, et de la mesure. Le procédé consiste également à appliquer la troisième valeur de correction à la mesure si une différence entre la première valeur de correction et la troisième valeur de correction est supérieure à une première valeur seuil ; appliquer la deuxième valeur de correction à la mesure si une différence entre la première valeur de correction et la deuxième valeur de correction est supérieure à une seconde valeur seuil ; et appliquer la première valeur de correction à la mesure si la différence entre la première valeur de correction et la deuxième valeur de correction est inférieure ou égale à la seconde valeur seuil.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)