Search International and National Patent Collections

1. (WO2018001937) SIDE PORTED MEMS SENSOR DEVICE PACKAGE

Pub. No.:    WO/2018/001937    International Application No.:    PCT/EP2017/065658
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Tue Jun 27 01:59:59 CEST 2017
IPC: B81B 7/00
B81B 7/02
Applicants: ROBERT BOSCH GMBH
Inventors: SUVANTO, Mikko VA
Title: SIDE PORTED MEMS SENSOR DEVICE PACKAGE
Abstract:
A MEMS sensor device package comprises a sensor assembly comprising a sensor device and a sensor circuit communicating coupled to the sensor device, The MEMS sensor device package further comprises an assembly package housing having a top member and a bottom member attached to the top member for encapsulating the sensor assembly. A passageway fluidly coupled the sensor device to attributes outside the package housing the passageway is embedded into the package housing, wherein the top member comprising a top wall and side walls, the side walls are attached to the bottom member, and the passageway is embedded into at least one of the side walls.