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1. (WO2018001416) SENSOR DEVICE

Pub. No.:    WO/2018/001416    International Application No.:    PCT/DE2017/100543
Publication Date: Fri Jan 05 00:59:59 CET 2018 International Filing Date: Fri Jun 30 01:59:59 CEST 2017
IPC: G01D 5/14
G01D 5/347
Applicants: PHYSIK INSTRUMENTE (PI) GMBH & CO. KG
Inventors: GRABOWSKI, Axel
WALENDA, Carolin
Title: SENSOR DEVICE
Abstract:
The invention relates to a sensor device and method for detecting measurement data relating to the absolute position of a linearly or rotationally moveable body, comprising an optical sensor system, wherein the optical sensor system uses exclusively zero-order rejections for the position measuring, and a magnetic sensor system which emits a second sensor output signal depending on the position to be determined of the moveable body, wherein the gauge of the optical sensor system and the gauge of the magnetic sensor system are integrated in a common gauge body, and a computer unit which is provided to obtain the first sensor output signal and the second sensor output signal and to generate a common sensor output signal from the first sensor output signal and the second sensor output signal, wherein the current period of the second sensor system can be deduced from the first sensor output signal at every time, in order to calculate clear absolute position information based on the first and second sensor output signal.