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1. (WO2017204858) SHOCK CAGING FEATURES FOR MEMS ACTUATOR STRUCTURES
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Pub. No.: WO/2017/204858 International Application No.: PCT/US2016/067921
Publication Date: 30.11.2017 International Filing Date: 21.12.2016
IPC:
B81B 7/00 (2006.01) ,B81B 3/00 (2006.01) ,B81B 7/02 (2006.01) ,B81B 7/04 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
7
Micro-structural systems
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
7
Micro-structural systems
02
containing distinct electrical or optical devices of particular relevance for their function, e.g. micro-electro-mechanical systems (MEMS)
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
7
Micro-structural systems
04
Networks or arrays of similar micro-structural devices
Applicants:
MEMS DRIVE INC. [US/US]; 2832 E. Foothill Blvd. Pasadena, California 91107, US
Inventors:
LIU, Xiaolei; US
NG, Matthew; US
CALVET, Robert; US
MORABITO, Gerardo; US
Agent:
COLANDREO, Brian, J.; US
ABRAMSON, Michael T.; US
PLACKER, Jeffrey T.; US
SARGEANT, Heath M.; US
WHITTENBERGER, Mark H.; US
Priority Data:
15/165,89326.05.2016US
Title (EN) SHOCK CAGING FEATURES FOR MEMS ACTUATOR STRUCTURES
(FR) ÉLÉMENTS DE BLOCAGE DE CHOCS DESTINÉS À DES STRUCTURES D'ACTIONNEUR MEMS
Abstract:
(EN) Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
(FR) L'invention porte sur des structures de blocage destinées à bloquer ou autrement à réduire l'impulsion de choc mécanique subie par des structures de poutre de dispositifs à microsystème électromécanique (MEMS) pendant des événements qui peuvent causer un choc mécanique au dispositif MEMS. Les structures de blocage entourent au moins partiellement la poutre de manière à limiter le mouvement de la poutre dans une direction perpendiculaire à l'axe longitudinal de la poutre, ce qui permet de réduire la contrainte exercée sur la poutre au cours d'un événement de choc mécanique. Les structures de blocage peuvent être utilisées en association avec des poutres résistantes aux chocs mécaniques.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)