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1. (WO2017203949) FABRY-PEROT INTERFERENCE FILTER AND PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER

Pub. No.:    WO/2017/203949    International Application No.:    PCT/JP2017/017172
Publication Date: Fri Dec 01 00:59:59 CET 2017 International Filing Date: Tue May 02 01:59:59 CEST 2017
IPC: G02B 26/00
B81B 3/00
B81C 1/00
Applicants: HAMAMATSU PHOTONICS K.K.
浜松ホトニクス株式会社
Inventors: KASAHARA Takashi
笠原 隆
SHIBAYAMA Katsumi
柴山 勝己
HIROSE Masaki
廣瀬 真樹
KAWAI Toshimitsu
川合 敏光
OYAMA Hiroki
大山 泰生
KURAMOTO Yumi
蔵本 有未
Title: FABRY-PEROT INTERFERENCE FILTER AND PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER
Abstract:
A Fabry-Perot interference filter 1 that comprises: a substrate 11 that has a first surface 11a; a first laminate 22 that is arranged on the first surface 11a and has a first mirror part 31; a second laminate 24 that has a second mirror part 32 that faces the first mirror part 31 across a space S; and an intermediate layer 23 that demarcates the space S between the first laminate 22 and the second laminate 24. The substrate 11 has an outer edge part 11c that, seen from a direction that is orthogonal to the first surface 11a, is positioned further to the outside than an outer edge of the intermediate layer 23. The second laminate 24 also has: a covering part 33 that covers the intermediate layer 23; and a peripheral edge part 34 that is positioned upon the first surface 11a at the outer edge part 11c. The second mirror part 32, the covering part 33, and the peripheral edge part 34 are integrally formed so as to be continuous. The peripheral edge part 34 is thinned along an outer edge of the outer edge part 11c.