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1. (WO2017203757) RESONATOR AND RESONANCE DEVICE

Pub. No.:    WO/2017/203757    International Application No.:    PCT/JP2017/005609
Publication Date: Fri Dec 01 00:59:59 CET 2017 International Filing Date: Fri Feb 17 00:59:59 CET 2017
IPC: H03H 9/24
B81B 3/00
H01L 41/113
H01L 41/187
H03H 9/02
Applicants: MURATA MANUFACTURING CO., LTD.
株式会社村田製作所
Inventors: INOUE, Yoshihisa
井上 義久
NISHIMURA, Toshio
西村 俊雄
TAKEYAMA Keisuke
竹山 佳介
KAWAI, Ryota
河合 良太
GOTO, Yuichi
後藤 雄一
Title: RESONATOR AND RESONANCE DEVICE
Abstract:
Fluctuation in the temperature characteristics of the resonance frequency is suppressed in a step for adjusting resonance. The invention has: a base; a first electrode and a second electrode; and a piezoelectric film provided between the first electrode and the second electrode, said film having an upper surface that faces the first electrode, and said film vibrating in a prescribed vibration mode when a voltage is applied between the first and second electrodes. The invention further has a vibration arm, one end of which being a fixed end connected to the front end of the base, and the other end of which being an open end extending in the direction heading away from the front end. The invention is provided with: a protection film that is provided facing the top surface of the piezoelectric film with the first electrode therebetween, said film being provided to span from the vibration arm to the base; and a temperature characteristics adjustment film comprising a material different from that of the protective film, the temperature characteristics adjustment film being provided so that a portion of the protective film is exposed on a surface on the base and/or further to the fixed end side than the center in the direction in which the vibrating arm extends in the plurality of vibration arms.