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1. (WO2017203662) DIGITAL HOLOGRAPHIC IMAGING APPARATUS AND IMAGING METHOD

Pub. No.:    WO/2017/203662    International Application No.:    PCT/JP2016/065615
Publication Date: Fri Dec 01 00:59:59 CET 2017 International Filing Date: Fri May 27 01:59:59 CEST 2016
IPC: G03H 1/00
G02B 21/00
Applicants: OLYMPUS CORPORATION
オリンパス株式会社
Inventors: MATSUO Keigo
松尾圭悟
Title: DIGITAL HOLOGRAPHIC IMAGING APPARATUS AND IMAGING METHOD
Abstract:
According to the present invention, an illumination unit 10 irradiates an object 4 to be inspected with illumination light 12. An imaging element 20 includes a plurality of two-dimensionally arranged pixels 24, images the intensity distribution of an interference pattern formed by illumination light 14 having been affected by the object 4 to be inspected, and outputs image data S2. A defect information acquisition unit 70 acquires defect position information S3 indicating the position of a defective pixel 24d in the imaging element 20. An arithmetic unit 30 reconstructs an object image S1 representing the object 4 to be inspected on the basis of the image data S2 and the defect position information S3.