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1. (WO2017203173) METHOD FOR HEALING DEFECTS IN A LAYER OBTAINED BY IMPLANTATION THEN DETACHMENT FROM A SUBSTRATE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2017/203173    International Application No.:    PCT/FR2017/051290
Publication Date: 30.11.2017 International Filing Date: 24.05.2017
IPC:
H01L 41/312 (2013.01), H03H 3/02 (2006.01), H03H 3/08 (2006.01)
Applicants: SOITEC [FR/FR]; Parc Technologique des Fontaines Chemin des Franques 38190 BERNIN (FR)
Inventors: GHYSELEN, Bruno; (FR)
Agent: REGIMBEAU; 139 Rue Vendôme 69477 Lyon Cedex 06 (FR)
Priority Data:
1654673 25.05.2016 FR
Title (EN) METHOD FOR HEALING DEFECTS IN A LAYER OBTAINED BY IMPLANTATION THEN DETACHMENT FROM A SUBSTRATE
(FR) PROCEDE DE GUERISON DE DEFAUTS DANS UNE COUCHE OBTENUE PAR IMPLANTATION PUIS DETACHEMENT D'UN SUBSTRAT
Abstract: front page image
(EN)The invention relates to a method for healing defects in a layer (10) of composition ABO3 where A consists of at least one element from: Li, Na, K, H, Ca, Mg, Ba, Sr, Pb, La, Bi, Y, Dy, Gd, Tb, Ce, Pr, Nd, Sm, Eu, Ho, Zr, Sc, Ag and Tl, and B consists of at least one element from: Nb, Ta, Sb, Ti, Zr, Sn, Ru, Fe, V, Sc, C, Ga, Al, Si, Mn, Zr and Tl, said layer (10) being obtained by a layer-transfer method in which ionic species are implanted into a substrate (100) of composition ABO3 so as to form a weakened zone delineating said layer, said substrate then being detached along the weakened zone in order to obtain a layer (10) that is detached from the rest of the donor substrate, characterised in that it comprises exposing said layer (10) to a medium (M) containing ions of a constituent element A so as to make said ions penetrate into said transferred layer.
(FR)L'invention concerne un procédé de guérison de défauts d'une couche (10) de composition ABO3 où A est constitué d'au moins un élément parmi : Li, Na, K, H, Ca, Mg, Ba, Sr, Pb, La, Bi, Y, Dy, Gd, Tb, Ce, Pr, Nd, Sm, Eu, Ho, Zr, Sc, Ag, Tl et B est constitué d'au moins un élément parmi : Nb, Ta, Sb, Ti, Zr, Sn, Ru, Fe, V, Sc, C, Ga, Al, Si, Mn, Zr, Tl, ladite couche (10) étant obtenue par un procédé de transfert de couche dans lequel on implante des espèces ioniques dans un substrat (100) de composition ABO3 de manière à former une zone de fragilisation délimitant ladite couche puis on détache ledit substrat le long de la zone de fragilisation pour obtenir une couche (10) détachée du reste du substrat donneur, caractérisé en ce qu'il comprend l'exposition de ladite couche (10)à un milieu (M) contenant des ions d'un élément constituant A de sorte à faire pénétrer lesdits ions dans ladite couche transférée.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: French (FR)
Filing Language: French (FR)