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1. (WO2017201334) COMPLEX SPATIALLY-RESOLVED REFLECTOMETRY/REFRACTOMETRY
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Pub. No.: WO/2017/201334 International Application No.: PCT/US2017/033404
Publication Date: 23.11.2017 International Filing Date: 18.05.2017
IPC:
G01N 21/47 (2006.01) ,G01N 21/956 (2006.01) ,G06T 7/00 (2017.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
17
Systems in which incident light is modified in accordance with the properties of the material investigated
47
Scattering, i.e. diffuse reflection
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7
Image analysis, e.g. from bit-mapped to non bit-mapped
Applicants:
REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE [US/US]; 1800 Grant Street, 8th Floor Denver, CO 80203, US
Inventors:
PORTER, Christina, L.; US
ADAMS, Daniel, E.; US
TANKSALVALA, Michael; US
SHANBLATT, Elisabeth; US
MURNANE, Margaret, M.; US
KAPTEYN, Henry, C.; US
Agent:
BALES, Jennifer, L.; US
Priority Data:
62/338,96119.05.2016US
Title (EN) COMPLEX SPATIALLY-RESOLVED REFLECTOMETRY/REFRACTOMETRY
(FR) RÉFLECTOMÉTRIE/RÉFRACTOMÉTRIE D'IMAGERIE COMPLEXE À RÉSOLUTION SPATIALE
Abstract:
(EN) Apparatus and methods for complex imaging reflectometry and refractometry using at least partially coherent light (121). Quantitative images yield spatially-dependent, local material information about a sample (128, 228) of interest. These images may provide material properties such as chemical composition, the thickness of chemical layers, dopant concentrations, mixing between layers of a sample, reactions at interfaces, etc. An incident beam (123) of VUV wavelength or shorter is scattered off of a sample (128, 228) and imaged at various angles, wavelengths, and/or polarizations. The power of beam (123) is also measured. This data is used to obtain images of a sample's absolute, spatially varying, complex reflectance or transmittance, which is then used to determine spatially-resolved, depth-dependent sample material properties.
(FR) L'invention porte sur un appareil et sur des procédés de réflectométrie et de réfractométrie d'imagerie complexe à l'aide d'une lumière au moins partiellement cohérente. Des images quantitatives fournissent des informations matérielles locales dépendant de l'espace concernant un échantillon (128, 228) d'intérêt. Lesdites images peuvent fournir des propriétés matérielles telles que la composition chimique, l'épaisseur des couches chimiques, les concentrations dopantes, le mélange entre les couches d'un échantillon, les réactions au niveau des interfaces, etc. Un faisceau incident (123) de longueur d'onde VUV ou plus court est diffusé à partir d'un échantillon (128, 228) et imagé à divers angles, longueurs d'onde et/ou polarisations. La puissance du faisceau (123) est également mesurée. Lesdites données sont utilisées pour obtenir des images de réflectance ou de transmittance complexes absolues, variant dans l'espace, d'un échantillon, qui sont ensuite utilisées pour déterminer des propriétés matérielles résolues spatialement, dépendant de la profondeur, de l'échantillon.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)