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1. (WO2017199395) WAVELENGTH DETECTION DEVICE

Pub. No.:    WO/2017/199395    International Application No.:    PCT/JP2016/064877
Publication Date: Fri Nov 24 00:59:59 CET 2017 International Filing Date: Fri May 20 01:59:59 CEST 2016
IPC: G01J 3/26
H01S 3/137
H01S 3/139
Applicants: GIGAPHOTON INC.
ギガフォトン株式会社
Inventors: MORIYA, Masato
守屋 正人
Title: WAVELENGTH DETECTION DEVICE
Abstract:
This wavelength detection device detects, using at least one etalon, the wavelength of ultraviolet laser light outputted from a laser resonator. The wavelength detection device is provided with: a first housing that hermetically seals an internal space having the etalon housed therein; an input window, which is disposed in a first opening formed in the first housing, and which takes the ultraviolet laser light into the first housing; a first seal member that seals a gap between an end portion of the input window and an inner peripheral portion of the first opening; a light blocking film, which is disposed between the seal member and the end portion of the input window, and which blocks the ultraviolet laser light travelling to the seal member from the input window; and a diffusion element, which is disposed on the outer side of the first housing, and which diffuses the ultraviolet laser light in a stage prior to the input window.