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1. (WO2017198401) SUBLIMATED GAS SUPPLY SYSTEM AND SUBLIMATED GAS SUPPLY METHOD

Pub. No.:    WO/2017/198401    International Application No.:    PCT/EP2017/059036
Publication Date: Fri Nov 24 00:59:59 CET 2017 International Filing Date: Fri Apr 14 01:59:59 CEST 2017
IPC: C23C 16/448
C23C 16/52
Applicants: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
Inventors: SHIGAKI, Chika
ISHIZUKA, Sayaka
KOURA, Terumasa
NOZAWA, Fumikazu
Title: SUBLIMATED GAS SUPPLY SYSTEM AND SUBLIMATED GAS SUPPLY METHOD
Abstract:
Provided is a sublimated gas supply system capable of stabilizing the concentration of a sublimated gas of a solid material to be supplied and continuously supplying a sublimated gas with a stable concentration. The sublimated gas supply system includes a container; a heater for heating the container; a vacuum container configured so that a sublimated gas is introduced from the container in a vacuum state when a pressure measured with a container pressure gauge is the saturated vapor pressure of the sublimated gas; a flow amount control unit for controlling the flow amount of the dilution gas so that the concentration of the sublimated gas in the dilution gas inside the vacuum container is controlled to be a prescribed concentration based on the pressure inside the vacuum container when the sublimated gas is introduced into the vacuum container; and a lead-out line for leading out the sublimated gas from the vacuum container into a post process when the concentration of the sublimated gas in the dilution gas reaches the prescribed concentration.