Search International and National Patent Collections

1. (WO2017198298) APPARATUS AND METHOD FOR TRANSPORT

Pub. No.:    WO/2017/198298    International Application No.:    PCT/EP2016/061142
Publication Date: Fri Nov 24 00:59:59 CET 2017 International Filing Date: Thu May 19 01:59:59 CEST 2016
IPC: C23C 14/04
Applicants: APPLIED MATERIALS, INC.
VERCESI, Tommaso
HEIMEL, Oliver
HAAS, Dieter
BANGERT, Stefan
Inventors: VERCESI, Tommaso
HEIMEL, Oliver
HAAS, Dieter
BANGERT, Stefan
Title: APPARATUS AND METHOD FOR TRANSPORT
Abstract:
An apparatus for contactless transportation of a deposition source is provided. The apparatus includes a deposition source assembly. The deposition source assembly includes the deposition source. The deposition source assembly includes a first active magnetic unit. The apparatus includes a guiding structure extending in a source transportation direction. The deposition source assembly is movable along the guiding structure. The first active magnetic unit and the guiding structure are configured for providing a first magnetic levitation force for levitating the deposition source assembly.