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1. (WO2017198297) APPARATUS AND METHOD FOR TRANSPORTATION OF A DEPOSITION SOURCE

Pub. No.:    WO/2017/198297    International Application No.:    PCT/EP2016/061141
Publication Date: Fri Nov 24 00:59:59 CET 2017 International Filing Date: Thu May 19 01:59:59 CEST 2016
IPC: C23C 14/12
C23C 14/24
C23C 14/56
C23C 14/34
H01L 51/00
H01L 51/56
Applicants: APPLIED MATERIALS, INC.
BANGERT, Stefan
HEIMEL, Oliver
HAAS, Dieter
VERCESI, Tommaso
Inventors: BANGERT, Stefan
HEIMEL, Oliver
HAAS, Dieter
VERCESI, Tommaso
Title: APPARATUS AND METHOD FOR TRANSPORTATION OF A DEPOSITION SOURCE
Abstract:
An apparatus for contactless transportation of a deposition source is provided. The apparatus includes a deposition source assembly. The deposition source assembly includes the deposition source. The deposition source assembly includes a first active magnetic unit. The apparatus includes a guiding structure extending in a source transportation direction. The deposition source assembly is movable along the guiding structure. The first active magnetic unit and the guiding structure are configured for providing a first magnetic levitation force for levitating the deposition source assembly.