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Machine translation
1. (WO2017198297) APPARATUS AND METHOD FOR TRANSPORTATION OF A DEPOSITION SOURCE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.:    WO/2017/198297    International Application No.:    PCT/EP2016/061141
Publication Date: 23.11.2017 International Filing Date: 18.05.2016
Chapter 2 Demand Filed:    04.05.2017    
IPC:
C23C 14/12 (2006.01), C23C 14/24 (2006.01), C23C 14/56 (2006.01), C23C 14/34 (2006.01), H01L 51/00 (2006.01), H01L 51/56 (2006.01)
Applicants: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue Santa Clara, California 95054 (US).
BANGERT, Stefan [DE/DE]; (DE) (US only).
HEIMEL, Oliver [DE/DE]; (DE) (US only).
HAAS, Dieter [DE/US]; (US) (US only).
VERCESI, Tommaso [IT/DE]; (DE) (US only)
Inventors: BANGERT, Stefan; (DE).
HEIMEL, Oliver; (DE).
HAAS, Dieter; (US).
VERCESI, Tommaso; (DE)
Agent: ZIMMERMANN & PARTNER PATENTANWÄLTE MBB; Josephspitalstr. 15 80331 München (DE)
Priority Data:
Title (EN) APPARATUS AND METHOD FOR TRANSPORTATION OF A DEPOSITION SOURCE
(FR) APPAREIL ET PROCÉDÉ DE TRANSPORT DE SOURCE DE DÉPÔT
Abstract: front page image
(EN)An apparatus for contactless transportation of a deposition source is provided. The apparatus includes a deposition source assembly. The deposition source assembly includes the deposition source. The deposition source assembly includes a first active magnetic unit. The apparatus includes a guiding structure extending in a source transportation direction. The deposition source assembly is movable along the guiding structure. The first active magnetic unit and the guiding structure are configured for providing a first magnetic levitation force for levitating the deposition source assembly.
(FR)La présente invention porte sur un appareil de transport sans contact d'une source de dépôt. L'appareil comprend un ensemble support de dépôt. L'ensemble source de dépôt comprend la source de dépôt. L'ensemble source de dépôt comprend une première unité magnétique active. L'appareil comprend une structure de guidage s'étendant dans une direction de transport de source. L'ensemble source de dépôt est mobile le long de la structure de guidage. La première unité magnétique active et la structure de guidage sont configurées pour fournir une première force de lévitation magnétique pour permettre la lévitation de l'ensemble source de dépôt.
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW.
African Regional Intellectual Property Organization (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).
Publication Language: English (EN)
Filing Language: English (EN)