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1. (WO2017197288) CRITICAL DIMENSION CONTROL BY USE OF A PHOTO AGENT

Pub. No.:    WO/2017/197288    International Application No.:    PCT/US2017/032450
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Sat May 13 01:59:59 CEST 2017
IPC: G03F 7/20
G03F 7/00
G03F 7/40
Applicants: TOKYO ELECTRON LIMITED
TOKYO ELECTRON U.S. HOLDINGS, INC.
Inventors: DEVILLIERS, Anton, J.
CARCASI, Michael, A.
Title: CRITICAL DIMENSION CONTROL BY USE OF A PHOTO AGENT
Abstract:
A method for critical dimension control in which a substrate is received having an underlying layer and a patterned layer formed on the underlying layer, the patterned layer including radiation- sensitive material and a pattern of varying elevation with a first critical dimension. The method further includes applying an overcoat layer over the patterned layer, the overcoat layer containing a photo agent selected from a photosensitizer generator compound, a photosensitizer compound, a photoacid generator compound, a photoactive agent, an acid- containing compound, or a combination of two or more thereof. The overcoat layer is then exposed to electromagnetic radiation, wherein the dose of electromagnetic radiation applied to different regions of the substrate is varied, and then the overcoat layer and patterned layer are heated. The method further includes developing the overcoat layer and the patterned layer to alter the first critical dimension of the patterned layer to a second critical dimension.