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1. WO2017196702 - PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CONTROL VALVES

Publication Number WO/2017/196702
Publication Date 16.11.2017
International Application No. PCT/US2017/031498
International Filing Date 08.05.2017
IPC
F16K 37/00 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
37Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
F16K 51/02 2006.01
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
51Other details not peculiar to particular types of valves or cut-off apparatus
02specially adapted for high-vacuum installations
CPC
F16K 37/0041
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
37Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
0025Electrical or magnetic means
0041for measuring valve parameters
F16K 37/0083
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
37Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
0075For recording or indicating the functioning of a valve in combination with test equipment
0083by measuring valve parameters
F16K 37/0091
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
37Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
0075For recording or indicating the functioning of a valve in combination with test equipment
0091by measuring fluid parameters
F16K 51/02
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
51Other details not peculiar to particular types of valves or cut-off apparatus
02specially adapted for high-vacuum installations
G01F 9/001
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
9Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine
001with electric, electro-mechanic or electronic means
G01N 17/008
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
17Investigating resistance of materials to the weather, to corrosion, or to light
008Monitoring fouling
Applicants
  • MKS INSTRUMENTS, INC. [US]/[US]
Inventors
  • CHAMBERLAIN, David Brian
  • DAVIDKOVICH, Vladislav
  • BENEDICT, Scott
  • HILL, Gordon
Agents
  • MILLS, Steven M.
  • FOLEY, Shawn
  • CHOW, Stephen Y.
  • GOLDMAN, Gabriel
  • GOMES, David W.
  • HAMILTON, John A.
  • HASAN, Shahid
  • JOBSE, Bruce D.
  • LOPEZ, Orlando
  • MARAIA, Joseph M.
  • MOORE, Ronda P.
  • SCHEPPER, Marlo M.
  • SERIO, John C.
  • SUSAN, Janine M.
  • SORKIN, Paul
  • QUINN, Joseph P.
Priority Data
15/581,87528.04.2017US
62/333,98910.05.2016US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) PREDICTIVE DIAGNOSTICS SYSTEMS AND METHODS USING VACUUM PRESSURE CONTROL VALVES
(FR) SYSTÈMES ET PROCÉDÉS DE DIAGNOSTICS PRÉDICTIFS UTILISANT DES VANNES DE RÉGULATION DE PRESSION SOUS VIDE
Abstract
(EN)
Calibration of a valve in a vacuum system and providing a diagnostic indication in the vacuum system using the calibration includes measuring conductance of the valve as a function of angular valve position and generating a conductance calibration map or function for use during operation of the valve. An actual angular valve position is set based on the received set point angular valve position and a difference between the measured valve conductance and a predefined metric of conductance versus angular valve position. An actual system conductance and a difference between the actual system conductance and a reference system conductance for the system are determined. The diagnostic indication of a fault in the system is generated based on the actual angular valve position of the valve and the difference between the actual system conductance and the reference system conductance for the system.
(FR)
L'invention concerne l'étalonnage d'une vanne dans un système de vide et la fourniture d'une indication de diagnostic dans le système de vide en utilisant l'étalonnage, comprenant la mesure de la conductance de la vanne en fonction de la position angulaire de la vanne et la génération d'une cartographie ou fonction d'étalonnage de conductance destinée à être utilisée pendant le fonctionnement de la vanne. Une position angulaire réelle de vanne est définie sur la base de la position angulaire de vanne de consigne reçue et une différence entre la conductance de vanne mesurée et un indicateur de conductance prédéfini par rapport à la position angulaire de vanne. Une conductance réelle du système et une différence entre la conductance réelle du système et une conductance d'un système de référence pour le système sont déterminées. L'indication de diagnostic d'une anomalie dans le système est générée sur la base de la position angulaire réelle de vanne de la vanne et la différence entre la conductance réelle du système et la conductance d'un système de référence pour le système.
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