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1. (WO2017196683) AN ULTRASONIC TRANSDUCER OPERABLE IN A SURFACE ACOUSTIC WAVE (SAW) MODE
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Pub. No.: WO/2017/196683 International Application No.: PCT/US2017/031439
Publication Date: 16.11.2017 International Filing Date: 05.05.2017
IPC:
B06B 1/06 (2006.01) ,H01L 41/04 (2006.01) ,H03H 9/25 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
06
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
B
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
1
Processes or apparatus for generating mechanical vibrations of infrasonic, sonic or ultrasonic frequency
02
making use of electrical energy
06
operating with piezo-electric effect or with electrostriction
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02
Details
04
of piezo-electric or electrostrictive elements
H ELECTRICITY
03
BASIC ELECTRONIC CIRCUITRY
H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
9
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
25
Constructional features of resonators using surface acoustic waves
Applicants: INVENSENSE, INC.[US/US]; 1745 Technology Drive, Suite 200 San Jose, California 95110, US
Inventors: DANEMAN, Michael; US
Agent: BLECHER, Matthew J.; US
Priority Data:
15/424,70303.02.2017US
62/334,41310.05.2016US
Title (EN) AN ULTRASONIC TRANSDUCER OPERABLE IN A SURFACE ACOUSTIC WAVE (SAW) MODE
(FR) TRANSDUCTEUR ULTRASONORE POUVANT FONCTIONNER DANS UN MODE À ONDES ACOUSTIQUES DE SURFACE (SAW)
Abstract:
(EN) A Piezoelectric Micro machined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. The PMUT is also configured to operate in a Surface Acoustic Wave (SAW) mode. Also provided are an integrated MEMS array, a method for operating an array of PMUT / SAW dual-mode devices, and a PMUT / SAW dual-mode device.
(FR) Dispositif de transducteur ultrasonore micro-usiné piézoélectrique (PMUT). Le PMUT comprend un substrat et une structure de support de bord reliée au substrat. Une membrane est reliée à la structure de support de bord de telle sorte qu'une cavité est délimitée entre la membrane et le substrat, la membrane étant conçue pour permettre un déplacement à des fréquences ultrasonores. La membrane comprend une couche piézoélectrique et des première et seconde électrodes accouplées aux côtés opposés de la couche piézoélectrique. Le PMUT est également conçu pour fonctionner dans un mode à ondes acoustiques de surface (SAW). L'invention concerne également un réseau MEMS intégré, un procédé de fonctionnement d'un réseau de dispositifs à double mode PMUT/SAW, et un dispositif à double mode PMUT/SAW.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)