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1. (WO2017196680) AN ULTRASONIC TRANSDUCER WITH A NON-UNIFORM MEMBRANE
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2017/196680 International Application No.: PCT/US2017/031426
Publication Date: 16.11.2017 International Filing Date: 05.05.2017
IPC:
B06B 1/06 (2006.01) ,G10K 9/122 (2006.01) ,G10K 13/00 (2006.01) ,H01L 41/04 (2006.01)
B PERFORMING OPERATIONS; TRANSPORTING
06
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
B
GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
1
Processes or apparatus for generating mechanical vibrations of infrasonic, sonic or ultrasonic frequency
02
making use of electrical energy
06
operating with piezo-electric effect or with electrostriction
G PHYSICS
10
MUSICAL INSTRUMENTS; ACOUSTICS
K
SOUND-PRODUCING DEVICES;  METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
9
Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
12
electrically operated
122
using piezo-electric driving means
G PHYSICS
10
MUSICAL INSTRUMENTS; ACOUSTICS
K
SOUND-PRODUCING DEVICES;  METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
13
Cones, diaphragms, or the like, for emitting or receiving sound in general
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
41
Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
02
Details
04
of piezo-electric or electrostrictive elements
Applicants: INVENSENSE, INC.[US/US]; 1745 Technology Drive, Suite 200 San Jose, California 95110, US
Inventors: BERGER, Renata Melamud; US
NG, Eldwin; SG
Agent: BLECHER, Matthew J.; US
Priority Data:
15/469,38324.03.2017US
62/334,40810.05.2016US
Title (EN) AN ULTRASONIC TRANSDUCER WITH A NON-UNIFORM MEMBRANE
(FR) TRANSDUCTEUR ULTRASONORE À MEMBRANE NON UNIFORME
Abstract:
(EN) A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device includes a substrate, an edge support structure connected to the substrate, and a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane having non-uniform stiffness. The membrane includes a piezoelectric layer, a first electrode and a second electrode coupled to opposing sides of the piezoelectric layer, and a mechanical support layer coupled to one of the first electrode and the second electrode.
(FR) Dispositif à transducteur ultrasonore micro-usiné piézoélectrique (PMUT) comprenant un substrat, une structure de support de bord reliée au substrat, et une membrane reliée à la structure de support de bord de telle sorte qu'une cavité est délimitée entre la membrane et le substrat, la membrane étant conçue pour permettre un déplacement à des fréquences ultrasonores, la membrane ayant une rigidité non uniforme. La membrane comprend une couche piézoélectrique, une première électrode et une seconde électrode couplées aux côtés opposés de la couche piézoélectrique, et une couche de support mécanique couplée à la première électrode ou à la seconde électrode.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)