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1. (WO2017196678) SUPPLEMENTAL SENSOR MODES AND SYSTEMS FOR ULTRASONIC TRANSDUCERS

Pub. No.:    WO/2017/196678    International Application No.:    PCT/US2017/031421
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Sat May 06 01:59:59 CEST 2017
IPC: B06B 1/02
B06B 1/06
Applicants: INVENSENSE, INC.
Inventors: APTE, Nikhil
BERGER, Renata Melamud
DANEMAN, Michael
Title: SUPPLEMENTAL SENSOR MODES AND SYSTEMS FOR ULTRASONIC TRANSDUCERS
Abstract:
A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT / CMUT dual-mode devices, and a PMUT / CMUT dual-mode device.