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1. (WO2017196622) ION BEAM MATERIALS PROCESSING SYSTEM WITH GRID SHORT CLEARING SYSTEM FOR GRIDDED ION BEAM SOURCE

Pub. No.:    WO/2017/196622    International Application No.:    PCT/US2017/030970
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Fri May 05 01:59:59 CEST 2017
IPC: H01J 37/30
H01J 37/317
Applicants: VEECO INSTRUMENTS INC.
Inventors: DRUZ, Boris
YEVTUKHOV, Rustam
ELLIOT, Rhodri
BEST, Jim
PORSHNEV, Peter
Title: ION BEAM MATERIALS PROCESSING SYSTEM WITH GRID SHORT CLEARING SYSTEM FOR GRIDDED ION BEAM SOURCE
Abstract:
Embodiments relate to a grid short clearing system is provided for gridded ion beam sources used in industrial applications for materials processing systems that reduces grid damage during operation. In various embodiments, the ion source is coupled to a process chamber and a grid short clearing system includes methods for supplying a gas to the process chamber and setting the gas pressure to a predetermined gas pressure in the range between 50 to 750 Torr, applying an electrical potential difference between each adjacent pair of grids using a current-limited power supply, and detecting whether or not the grid shorts are cleared. The electrical potential difference between the grids is at least 10% lower than the DC electrical breakdown voltage between the grids with no contaminants.