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1. (WO2017195723) PARTICLE CHARGING DEVICE

Pub. No.:    WO/2017/195723    International Application No.:    PCT/JP2017/017364
Publication Date: Fri Nov 17 00:59:59 CET 2017 International Filing Date: Tue May 09 01:59:59 CEST 2017
IPC: H01T 23/00
B03C 3/38
H01T 19/02
G01N 27/62
Applicants: SHIMADZU CORPORATION
株式会社島津製作所
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
国立研究開発法人産業技術総合研究所
Inventors: SEKI, Hiroshi
関 洋
UENO, Yoshihiro
上野 良弘
OKUDA, Hiroshi
奥田 浩史
SAKURAI, Hiromu
桜井 博
Title: PARTICLE CHARGING DEVICE
Abstract:
In the present invention, an inlet unit (2), wherethrough a carrier gas containing particles to be charged is introduced to the interior of a housing (1), and an outlet unit (3), wherethrough charged particles are extracted, are provided so as to oppose one another on a straight line. An ion generating element (6) is disposed in the vicinity of the inlet unit (2) exit. Ring-shaped electrodes (7) are disposed between this element (6) and the outlet unit (3), forming a direct current electric field whereby charged particles are accelerated toward the outlet unit (3). Particles in the carrier gas enter into contact with and are charged by gas ions generated by the ion generating element (6) to become monovalent charged particles, and immediately upon becoming charged, are affected by the direct current electric field and are accelerated toward the outlet unit (3). In this manner, the monovalent charged particles immediately leave a mixed region (8) in which gas ions are present in high concentration such that the opportunity of entering into contact again with a gas ion is slim, and multivalent charging is suppressed. In addition, since the ion generating element (6) carries out single electrode charging, the charging efficiency is satisfactory. This allows monovalent charged particles to be extracted efficiently.